Our Company

Photomask 장비분야의
Global Leader ARETECH

아레텍주식회사는 반도체/디스플레이용 Photomask, Blank Mask 장비 전문 제작 기업 입니다. Photomask, Blank Mask, Mask Polishing 제조 등에 필요한
핵심 공정 설비 ( Coater, Developer, Etcher, Cleaner ) 전문 제작 업체로써
국내외 유수의 Mask 생산 업체에 납품을 하고 있습니다.

VIEW OUR STORY
Cleaner

ARTCLEAN3000S

ARTCLEAN3000S

product info

  • High Grade Cleaning Process(KrF/ArF)
  • Particle Free Robot System
  • EUV / H2 & O3 Water Process
  • Haze Free Process
  • User Friendly GUI
Cleaner

ARTCLEAN3000M

ARTCLEAN3000M

product info

  • High Grade Tech. Process(KrF/ArF)
  • High Throughput & Stability
  • Particle Free Robot System
  • Small Foot Print
  • User Friendly GUI
Developer/ Etcher

ARTPRO3000S

ARTPRO3000S

product info

  • High Grade Dev/Etch Process(KrF/ArF)
  • Particle Free Robot System
  • Application Slit or Spray Dispense Nozzle
  • Single & Dual Chamber Process
  • User Friendly GUI
Coater

ARTCO3000M

ARTCO3000M

product info

  • High Grade Tech. Process(KrF/ArF)
  • Excellent PR Uniformity & Defect
  • High Precision Baking & EBR Process
  • Particle Free Robot System
  • Small Foot Print
  • User Friendly GUI
Mask Packing System EFEM Stocker

MASK AUTO PACKING SYSTEM

MASK AUTO PACKING SYSTEM

product info

  • Blank Mask Auto Packing System
  • Prevention Mask Contamination
  • Customized for Customer Needs
  • Particle Free Robot System
Mask Packing System EFEM Stocker

MASK EFEM

MASK EFEM

product info

  • EFEM for Blank Mask Sputter
  • Prevention Mask Contamination
  • Customized for Customer Needs
  • High Throughput & Stability
  • Particle Free Robot System
Cleaner

ARTCLEAN6000D

Dual Spin Mask Cleaner

ARTCLEAN6000D

product info

  • High Grade Cleaning Process(TM,PSM)
  • High SPM Temperature Process
  • Dilute SC1 Process
  • High Throughput & Stability
  • Particle Free Robot System
  • EUV /H2 & O3 Water Process
  • User Friendly GUI
  • Mask Size: up to 1620*1780*17t
Cleaner

ARTCLEAN6000S

Single Spin Mask Cleaner

ARTCLEAN6000S

product info

  • High Grade Cleaning Process(TM,PSM)
  • Particle Free Robot System
  • High SPM Temperature Process
  • Dilute SC1 Process
  • EUV /H2 & O3 Water Process
  • Auto Pin Changer Application(Patent)
  • User Friendly GUI
  • Mask Size: up to 1620*1780*17t
Developer/ Etcher

ARTPRO6000S

SINGLE SPIN DEVELOPER/ETCHER

ARTPRO6000S

product info

  • High Grade DEV/Etch Process(TM,PSM)
  • Insitu Develop & Etch Process
  • Application Slit or Spray Dispense Nozzle
  • Auto Pin Changer Application(Patent)
  • Mask Size: up to 1620*1780*17t
Developer/ Etcher

ARTPRO6000D

DUAL SPIN DEVELOPER ＆ ETCHER

DUAL SPIN DEVELOPER ＆ ETCHER

product info

  • High Grade DEV/Etch Process(TM,PSM)
  • Particle Free Robot System
  • Application Slit or Spray Dispense Nozzle
  • Auto Pin Changer Application(Patent)
  • Mask Size: up to 1620*1780*17t
Baker

ARTCO6000B

MASK BAKING SYSTEM

MASK BAKING SYSTEM

product info

  • High Precision Uniformity Control
  • High Temperature(250℃) Baking Process
  • Particle Free Robot System
  • Non Contact Baking Process(Patent)
  • Mask Size: up to 1620*1780*17t
Coater

ARTCO6000I

INLINE COATING ＆ BAKING SYSTEM

ARTCO6000I

product info

  • High Grade Process(PR Uniformity, Defect)
  • High Spin RPM & Acc/Dec Control
  • High Temperature(250℃) Baking Process
  • Particle Free Robot System
  • Non Contact Coating & Baking Process(Patent)
  • Mask Size: up to 1620*1780*17t
Coater

ARTCO6000S

SINGLE SPIN COATER

ARTCO6000S

product info

  • High Grade Process(PR Uniformity, Defect)
  • High Spin RPM & Acc/Dec Control
  • Particle Free Robot System
  • Precision Chamber Ventilation Control
  • Mask Size: up to 1620*1780*17t
Mask Packing System

MASK AUTO PACKING SYSTEM

Mask Packing System

product info

  • Customized for Customer Needs
  • Prevention Mask Contamination
  • Mask Box Type: Horizontal only
  • User Friendly GUI
  • Mask Size: up to 1220*1500*13t
Mask Handler ＆ Carter

TMGV MASK CART

product info

  • Customized to customers
Mask Handler ＆ Carter

MANUAL EBR

product info

  • Customized to customers
Mask Handler ＆ Carter

PHOTO MASK ASSIST ARM

product info

  • Customized to customers
Mask Handler ＆ Carter

MASK BOX LIFT

product info

  • Customized to customers

Media & Press

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