제품특징

- High Grade Cleaning Process(TM,PSM)
- High SPM Temperature Process
- Dilute SC1 Process
- High Throughput & Stability
- Particle Free Robot System
- EUV /H2 & O3 Water Process
- User Friendly GUI
- Mask Size: up to 1620*1780*17t

제품특징

- High Grade Cleaning Process(TM,PSM)
- Particle Free Robot System
- High SPM Temperature Process
- Dilute SC1 Process
- EUV /H2 & O3 Water Process
- Auto Pin Changer Application(Patent)
- User Friendly GUI
- Mask Size: up to 1620*1780*17t