제품특징

- High Grade Cleaning Process(KrF/ArF)
- Particle Free Robot System
- EUV / H2 & O3 Water Process
- Haze Free Process
- User Friendly GUI

제품특징

- High Grade Tech. Process(KrF/ArF)
- High Throughput & Stability
- Particle Free Robot System
- Small Foot Print
- User Friendly GUI