Developer/ Etcher
제품정보
ARTPRO6000S
SINGLE SPIN DEVELOPER/ETCHER
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Product Info
제품정보
제품특징
-
- High Grade DEV/Etch Process(TM,PSM)
- Insitu Develop & Etch Process
- Application Slit or Spray Dispense Nozzle
- Auto Pin Changer Application(Patent)
- Mask Size: up to 1620*1780*17t
Developer/ Etcher
제품정보
ARTPRO6000D
DUAL SPIN DEVELOPER ＆ ETCHER
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Product Info
제품정보
제품특징
-
- High Grade DEV/Etch Process(TM,PSM)
- Particle Free Robot System
- Application Slit or Spray Dispense Nozzle
- Auto Pin Changer Application(Patent)
- Mask Size: up to 1620*1780*17t