Coater
제품정보
ARTCO6000I
INLINE COATING & BAKING SYSTEM
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Product Info
제품정보
제품특징
-
- High Grade Process(PR Uniformity, Defect)
- High Spin RPM & Acc/Dec Control
- High Temperature(250℃) Baking Process
- Particle Free Robot System
- Non Contact Coating & Baking Process(Patent)
- Mask Size: up to 1620*1780*17t
Coater
제품정보
ARTCO6000S
SINGLE SPIN COATER
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Product Info
제품정보
제품특징
-
- High Grade Process(PR Uniformity, Defect)
- High Spin RPM & Acc/Dec Control
- Particle Free Robot System
- Precision Chamber Ventilation Control
- Mask Size: up to 1620*1780*17t