Coater

ARTCO6000I

INLINE COATING & BAKING SYSTEM

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Product Info

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제품특징

    - High Grade Process(PR Uniformity, Defect)
    - High Spin RPM & Acc/Dec Control
    - High Temperature(250℃) Baking Process
    - Particle Free Robot System
    - Non Contact Coating & Baking Process(Patent)
    - Mask Size: up to 1620*1780*17t
Coater

ARTCO6000S

SINGLE SPIN COATER

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Product Info

제품정보

제품특징

    - High Grade Process(PR Uniformity, Defect)
    - High Spin RPM & Acc/Dec Control
    - Particle Free Robot System
    - Precision Chamber Ventilation Control
    - Mask Size: up to 1620*1780*17t